Instrument
InstrumentModel: Tescan Mira3Resolution: 1.0 nm, at 30kV and high vacuum modeElectron source: High brightness Schottky emitterAcceleration voltage: 50V to 30kVVacuum: high vacuum <9 × 10-3 Pa, low vacuum 7 to 500 Pa.Chamber: Internal diameter: 340 mm (width) × 315 mm (depth)Beam Deceleration Technology (BDT) for resolution at low beam voltagesDecontaminator/plasma cleaner DetectorsStandard ET SE d
