Dynamic parameter estimation of atomic layer deposition kinetics applied to in situ quartz crystal microbalance diagnostics
This paper presents the elaboration of an experimentally validated model of a continuous cross-flow atomic layer deposition (ALD) reactor with temporally separated precursor pulsing encoded in the Modelica language. For the experimental validation of the model, in situ quartz crystal microbalance (QCM) diagnostics was used to yield submonolayer resolution of mass deposition resulting from thin fil