Dense high aspect ratio pillar arrays for carbon MEMS devices
This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-m