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Nickel (Ni) is the key component in ohmic contacts for Mg-doped p-GaN, but the detailed formation mechanisms of the ohmic contact have not yet been understood. In this work, the effect of potassium hydroxide (KOH)-based chemical treatment on the surface of p-GaN is investigated using X-ray photoelectron spectroscopy (XPS), scanning tunneling microscopy (STM), and low-energy electron diffraction (L
